Ga FIB-SEM
TESCAN SOLARIS 2 is designed for fully automated TEM lamella preparation using the AI-powered TESCAN TEM AutoPrep™ Pro software. This system produces high-quality, ultra-thin samples for sub-10 nm technology nodes, such as advanced logic and memory devices.
PRODUCT DESCRIPTION
PRODUCT DESCRIPTION
TESCAN SOLARIS 2 is a fully automated Ga FIB-SEM designed for high-precision TEM lamella preparation, equipped with AI-driven TEM AutoTEM Pro™ software. Engineered for applications in Failure Analysis, R&D, and Quality Control, SOLARIS 2 seamlessly integrates advanced SEM and FIB alignments, ensuring consistent system readiness and reducing time to data.
It excels in handling a wide range of electronic devices, including the latest in logic, memory, power, and display technologies, providing reliable performance for your most demanding sample preparation needs.
FEATURES
FEATURES
Fast, Precise TEM Samples
Produce ultra-thin TEM samples from sub-10 nm nodes in under an hour with TESCAN TEM AutoPrep™ Pro. Fully automated from lift-out to final FIB polishing, it delivers consistently superior results every time.
Pinpoint Accuracy for Advanced Devices
Target single transistor lines in GAA or FinFET devices with pinpoint accuracy using AI-driven fiducial mark recognition and high-resolution imaging from the Triglav™ SEM column, featuring advanced SE and BSE detectors for enhanced contrast at the beam coincident point.
Adaptable Lamella Prep with OptiLift™
Prepare top-down, planar, and inverted lamella effortlessly with the OptiLift™ nanomanipulator, strategically placed “below FIB.” This innovative design eliminates the need for extra flipping devices, simplifying your workflow.
Always Ready, Always Aligned
Keep your system ready with automated electron and ion column alignments that run overnight, ensuring minimal setup and maximum uptime.
High-Resolution Imaging Excellence
The Triglav™ SEM column, designed for ultra-high-resolution imaging, delivers outstanding surface sensitivity and contrast, making it ideal for beam-sensitive materials.
Streamlined Productivity
The redesigned TESCAN TEM AutoPrep™ Pro offers intuitive navigation between processes and extensive customization for any TEM lamella workflow, boosting productivity for every user.
