Multifunctional Measurement Instrument
The MFM-3500 Series High-Precision Multi-Function Measurement Instrument offers simple operation and fully automated measurement cleanroom environments. Optical inspection supports high-speed non-contact measurement and multi-layer film thickness analysis.
ADVANTAGES
ADVANTAGES
Simple operation process, reduce training costs
Manual placement of test objects, with automatic machine positioning, measurement, and report output
Test objects are securely held in place using porous ceramic suction cups
The machine features a granite base with an air-floating vibration isolation table to effectively isolate high-frequency vibrations, minimizing the impact of machine vibrations
High-precision moving motors
Dust-proof cover designed for cleanroom environments
SECS/GEM connectivity management (optional)
FUNCTION DESCRIPTION
FUNCTION DESCRIPTION
【Optical Inspection】
High-speed/non-contact optical measurement
Non-transparent and transparent material appearances analysis
Multi-layer film thickness measurement
| Resolution=0.1μm |
1. Excluding linear thickness error of 20±1C, repeatability is < ±0.5μm 2. When environmental control (vibration) is good, its roughness Rz < 0.1μm, repeatability will be ±0.3μ 3. The above repeatability is 1σ |
| Accuracy |
1. Single-layer thickness accuracy 2. Including linear thickness error, for single-layer thickness > 50μm : < ± 0.01 x measurement result 3. Single-layer thickness ≦ 50μm : ± 0.5μm 4. The above repeatability = 1σ (± 0.5μm) |
