Micro Inspection System
Spirox MA6503D is a high quality image wafer inspection system with features of auto-storing defects image and position coordinate records to replace QC visual inspection on surface defects, including particles, scratches, etc.
FEATURES
FEATURES
Utilize a Line Scan Camera with wide FOV and fast scanning capabilities
Use a 3x lens to enhance image quality and improve the defect characteristics inspection
5μm Defects Inspection Items: Particles, Scratches, Pad Defects, Bump Defects
Support Probe Mark Inspection (PMI) and offer PAD quick selection for detection settings
Support 3D inspection to measurement of Bump height and coplanarity
Auto wafer-level chuck with ±1.7μm accuracy to process high accuracy wafer coordinate alignment
Zoning parameter setting to realize accurate inspection requirement by zones
FUNCTION DESCRIPTION
FUNCTION DESCRIPTION
【Inspection Process】
【Defect Inspection Application】
PRODUCT SPECIFICATIONS
PRODUCT SPECIFICATIONS
| MA6503D | ||
|---|---|---|
| Function |
|
|
| Wafer |
|
|
| Wafer Handling |
|
|
| Chuck |
|
|
| Optical |
|
|
| 2D Image Inspection |
|
|
| 3D Image Inspection |
|
|
| Software |
|
|
| Optional |
|
|
