Macro Inspection System
Spirox MA6500 is a high quality image wafer inspection system with features of auto-storing defects image and position coordinate records to replace IQC visual inspection on surface defects, including particles, scratches, etc.
FEATURES
FEATURES
65 mega pixel camera with high FOV and high recognizability
Use RGB particular algorithm to process color information and increase defect characteristics inspection
10μm Defects Inspection Items: Particles, Scratches, Pad Defects, Bump Defects
Auto wafer-level chuck with ±1.7μm accuracy to process high accuracy wafer coordinate alignment
Zoning parameter setting to realize accurate inspection requirement by zones
FUNCTION DESCRIPTION
FUNCTION DESCRIPTION
【Inspection Process】
【Defect Inspection Application】
PRODUCT SPECIFICATIONS
PRODUCT SPECIFICATIONS
| MA6500 | ||
|---|---|---|
| Function |
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| Wafer |
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| Wafer Handling |
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| Optical |
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| Chuck |
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| Image Auto-Inspection |
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| Software |
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| Inspection Time |
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| Optional |
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