High Voltage/Current Chucks
To support the evolution of high voltage applications, ERS offers a set of different High Voltage chucks, which can be customized to meet your exact requirements.
**ERS product distribution rights are limited to China.**
**ERS product distribution rights are limited to China.**
FEATURES
FEATURES
Options range from a simple 1.5kV coaxial up to 10kV coaxial, or even 3kV triaxial chuck with currents up to 600A, which can be supported for temperatures between -55°C to +300°C
The chuck guarantees low-level leakage during high voltage measurements up to 10kV, avoiding shot-through
Perfect to use for Taiko wafers or thin wafers, and our exchangeable top plate concept allows for flexibility in the test process
ERS advanced coating technology ensures that no distortion and oxidation will occur after replicate testing. On request, also offers individual vacuum designs to meet your requirements
ADVANTAGES
ADVANTAGES
Voltage up to 10kV / currents up to 600A, applicable for MOSFET and IGBT, etc.
RDSon data remains accurate and consistent
Safe loading of thin wafers
Low-level leakage current, down to 5pA
Compatible with different brands of probe stations, wide applicability, and the chuck top plate can be changed for different applications, saving production costs
Used for wafer testing and experimental analysis
FUNCTION DESCRIPTION
FUNCTION DESCRIPTION
【Options】
| Product Type | Maximum Voltage | Leakage Conditions at 3 kV Voltage |
|---|---|---|
| High Power Coaxial | Up to 10kV | Down to 1,2 nA |
| High Power Triaxial | Up to 3kV | Down to 50 pA |
| High Power Ultra-Low Noise | Up to 3kV | Down to 5 pA |
