Automated Prober (OPUS3 Series)
The SEMICS OPUS3 is the only prober on the market capable of handling 6", 8", and 12" SEMI Standard wafers without requiring a change kit. It is compact and offers high accuracy for consistent contact/probing, along with fast indexing time for greater throughput. A universal probe card can also be loaded.
FEATURES
FEATURES
Compact size for space efficiency
Universal probe card changer
Reliable temperature control
Stiff and strong Z structure
Map shift prevention
Real-time recipe validation
Intelligent pin alignment algorithm
Smart probing route algorithm
Flat loader for smartest footprint
Compatible with all type of tester
PRODUCT SPECIFICATIONS
PRODUCT SPECIFICATIONS
| OPUS3 | ||
|---|---|---|
| Wafer Size | 6, 8, 12 inch | |
| X/Y Probing Area |
X: ±175 mm Y: ±165 mm |
|
| Needle Force | 500 kg (depending on the model) | |
| X/Y Accuracy |
X: ±1.5 μm Y: ±1.5 μm |
|
| Tri-Temp |
Cold: -40℃ ~ 150℃ / -55℃ ~ 200℃ Hot: 150℃ / 200℃ Ambient Control (25℃) |
|
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